Senior PECVD Process Engineer

3 Months ago • 10 Years + • Software Development & Engineering

Job Summary

Job Description

The Senior PECVD Process Engineer will develop, sustain, and optimize PECVD processes for GaAs and InP-based device manufacturing. This involves process characterization, troubleshooting, and collaboration with various teams. The role requires using metrology tools, applying Statistical Process Control (SPC) and Design of Experiments (DOE), analyzing data, and documenting procedures. The engineer will also train technicians, support continuous improvement, and interact with equipment vendors. The job involves working in a cleanroom environment and adhering to safety and quality standards, ensuring adherence to company values such as Integrity, Collaboration, Accountability, Respect, and Enthusiasm.
Must have:
  • Develop and optimize PECVD processes for device manufacturing.
  • Use metrology tools to improve film properties.
  • Apply SPC and DOE to improve process stability.
  • Proficient in JMP, Excel, and Microsoft Office.
  • Document standard operating procedures and reports.
  • Train process technicians and junior engineers.
  • Strong understanding of thin film deposition.
Good to have:
  • Experience with MES systems (e.g., Camstar).

Job Details

Primary Duties & Responsibilities

  • Develop, sustain, and optimize PECVD processes for GaAs and InP-based device manufacturing.
  • Conduct process characterization and troubleshooting, working cross-functionally with R&D, production, and equipment teams.
  • Use metrology tools (e.g., ellipsometry, FTIR, profilometry, XPS, SEM) to monitor and improve film properties.
  • Apply Statistical Process Control (SPC) and Design of Experiments (DOE) to monitor and improve process stability and yield.
  • Utilize JMP and other statistical tools for data analysis, root cause investigation, and process correlation studies.
  • Document standard operating procedures, work instructions, and engineering reports.
  • Train process technicians and junior engineers on PECVD equipment and processes.
  • Support continuous improvement initiatives and technology transfer from R&D to production.
  • Interface with equipment vendors to evaluate tool performance and upgrades.

Education & Experience

  • Bachelor’s or Master’s degree in Materials Science, Chemical Engineering, Electrical Engineering, or related field.
  • 10+ years of direct experience in semiconductor PECVD process engineering, preferably with GaAs and InP substrates.

Skills

  • Strong understanding of thin film deposition, including SiNx, SiOx, and other PECVD films.
  • Proven experience with semiconductor metrology tools and techniques.
  • Familiar with automation techniques including SECS/GEM/APC/FDC
  • Solid background in SPC, Gage R&R, DOE, and root cause analysis.
  • Proficient in JMP, Excel, and other Microsoft Office software.
  • Excellent documentation, troubleshooting, and communication skills.
  • Experience with MES systems (e.g., Camstar) is a plus.

Working Conditions

  • Will be exposed to areas where hand tools and power tools are being operated
  • Will be exposed to areas where hazardous chemicals or gases are stored
  • Ability to work in a cleanroom environment per semi-conductor protocol/requirements

Physical Requirements

  • Work in a class 100/1000 clean room for extended periods
  • Wear full cleanroom attire (smock, mask, etc.)
  • Work with and/or around chemicals (such as solids and acids)
  • Stand for up to 4 hours at a time
  • Lift up to 16-30 Pounds 
  • Push/Pull up to 16-30 pounds
  • Sit for up to 4 hours at a time

Safety Requirements

 

All employees are required to follow the site EHS procedures and Coherent Corp. Corporate EHS standards.

Quality and Environmental Responsibilities

 

Depending on location, this position may be responsible for the execution and maintenance of the ISO 9000, 9001, 14001 and/or other applicable standards that may apply to the relevant roles and responsibilities within the Quality Management System and Environmental Management System.

Culture Commitment

Ensure adherence to company’s values (ICARE) in all aspects of your position at Coherent Corp.:

Integrity – Create an Environment of Trust

Collaboration – Innovate Through the Sharing of Ideas

Accountability – Own the Process and the Outcome

Respect – Recognize the Value in Everyone

Enthusiasm – Find a Sense of Purpose in Work


 

Coherent Corp. is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.


 

If you need assistance or an accommodation due to a disability, you may contact us at talentacquisition@coherent.com.


 

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